The synonyms are chamber, hollow, well.Ī typical example is a V-Groove (see Figure 1), which can be formed in 100 - Si substrate by KOH etching. It can be used also for the protection of movable structures in packaging, for thermal insulation or as a container for fluids (see Figure 1). In bulk micromachining, cavity is used to make the movement of a suspended element possible.

Improving the stiffness to mass ratio, they can have impact on resonant frequency and efficiency of the devices. Stiffening ribs are may be used to improve the stiffness of suspended structures. They can affect the resonant frequency and the reliability of the device. Metallic layers covering polymer sealing are used to make them hermetic, but can be used also to compensate the RF-interferences.Īnchors are structures connecting the suspended movable parts to the substrate. Special coatings are used also to prevent adhesion of movable structures or to reduce the stress. They can protect structures against chemical or mechanical corrosion that can release particles into the protected cavity. Is also used in relation to structures for reducing adhesion.įunctional layers are used mostly as protective coatings. Tips are small pointed or rounded structures often used for Scanning Probe Microscopy probes (SPM) - like atomic force microscope (AFM), but also for data storage (Millipede), electron tunnelling tip (used in sensors) or microneedles. Electrophoresis for analysis in microdevicesĪ tall vertical structure, usually narrow in proportion to its height, which is usually used as a support structure, anti-adhesion structure or a structure for thermal exchange. Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means. Manufacture of fluid circuit elements Manufacture of assemblages of such elements as integrated circuits (microvalves) Measuring or testing processes involving nucleic acids (DNA analysis) dimensions of channels and chambers are such that surface tension forces are important, e.g. multi-compartment structures by integrated microfluidic structures, i.e. miniaturised or microfabricated reactorsĬontainers for the purpose of retaining a material to be analysed with fluid transport, e.g.

Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus, Inorganic membrane formation (micropores) Methods for coating the needles with an active material for therapeutic purposes is not classified in B81 Microneedles (devices for introducing media into the body) N.B.: Manufacturing methods (other then plastic moulding) for making raised tips (in particular microneedles) are classified in B81C 1/00111. Microneedles (Devices for taking blood samples by percutaneous method) Microphones, microspeakers: Electrostatic transducers using semiconductor materials Details of microelectro-mechanical resonators, Driving or d etection means, Comb electrodes

Networks comprising electromechanical or electro-acoustic devices Electromechanical resonators. Piezo-electric devices (includes rotory motors, actuators and sensors using a piezo-electric element)Įlectro active polymer (EAP) actuated artificial musclesĮlectrostatic motors, electric motors using thermal effect anisotropic etching (for electrostatic relays H01H 59/0009, for relays in general H01H 50/005)Įlectrostatic relays Electro-adhesion relays making use of micromechanics Switches making use of micromechanics Apparatus or processes for their manufacturing, e.g. Mechanically-driven clocks or watches mechanical parts of clocks or watches in general N.B.: Processes for making gears (in particular for clocks) are classified in B81C 99/0075+ Micropumps having electric drive having plate-like flexible members, e.g. Ink jet, Nozzles, Production of nozzles, manufacturing processes, etching, dry etching, wet etching.

Piezo definition